Hafnium Foil For Semiconductor Equipment

Hafnium foil for semiconductor equipment needs to meet the following requirements:
1. Ultra high purity and low pollution

• Hafnium content ≥ 99.95%, strictly control alpha particle emission elements such as uranium (U) and thorium (Th) (<0.001 ppm) to avoid contaminating wafers or causing soft errors.

2. Resistance to plasma and halogen gas corrosion

• It has extremely high resistance to etching gases such as CF ₄, Cl ₂, BCl ∝, and plasma bombardment, with an annual corrosion rate of less than 0.005 mm and a lifespan of more than 10 times that of stainless steel.

3. High temperature stability and low thermal expansion

• The melting point is about 2233 ° C, and it does not deform at process temperatures of 300-600 ° C. Its coefficient of thermal expansion (6.5 × 10 ⁻⁶/K) is close to that of silicon, reducing process deviations caused by thermal stress.

4. Excellent vacuum performance

• The gas release rate is extremely low (in accordance with ASTM E595 standard), avoiding gas release and contamination of the film in high vacuum environments such as CVD and PVD chambers.
  

  

  

 The application scenarios of hafnium foil in semiconductors are as follows:
1. Plasma etching equipment

• Electrode plate: As the cathode/anode plate of capacitive coupled plasma (CCP) or inductively coupled plasma (ICP) etching machines, it can withstand high-frequency plasma erosion.
• Interior lining: protects the walls of the reaction chamber from corrosive gases, reduces metal contamination and particle generation.

2. Thin film deposition equipment

• CVD/PVD baffles and masks: used in chemical vapor deposition (CVD) and physical vapor deposition (PVD) processes, resistant to high temperatures and not involved in reactions.
• Heater substrate: As a supporting substrate for ceramic heaters, it provides a uniform thermal field and is pollution-free.

3. Ion implantation and annealing equipment

• Beam pipeline lining: resistant to high-energy ion sputtering, maintaining long-term dimensional stability.
• Annealing furnace insulation foil: isolates the thermal field during high-temperature annealing process to prevent impurities from diffusing into the wafer.

4. Wafer transportation and carrying

• Vacuum robotic arm gripper pad: Avoid direct contact with the wafer, reduce particle contamination and electrostatic damage.
• Craft boat bracket: It supports silicon wafers without deformation during high-temperature processes, ensuring batch consistency.

Hafnium foil for semiconductor equipment solves the extreme requirements for material corrosion resistance, cleanliness, and thermal stability in key processes such as etching and deposition through ultra-high purity control, precision machining, and surface optimization technology. Its application is directly related to the process accuracy, device reliability, and production line cost of chip manufacturing, and it is an indispensable functional material in advanced processes (such as below 7nm).

Shaanxi Zhongheng Weichuang Metal Materials Co., Ltd., as a leading hafnium material manufacturer and global exporter in China, has always been committed to providing customers with high-quality and high-purity hafnium products. We insist on integrated operation from production to sales, without any intermediate links, to ensure that you can obtain reliable products directly supplied from the source at the most competitive price.

The company strictly controls every production process, and all hafnium materials meet international standards with solid and guaranteed quality. We have a professional customer service team that is always online to respond to your needs, providing worry free services throughout the entire process from technical consultation to after-sales support, ensuring smooth cooperation and peace of mind in procurement.

If you have any needs, please feel free to inquire:
Email: zhwcjs2022@163.com
Shaanxi Zhongheng Weichuang Metal Materials Co., Ltd. is willing to create value with global customers through excellent products and sincere services, and work together for win-win results!

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